Topics

The Workshop will focus on the physics of nanometer-scale multilayer films optimized for various applications in the Extreme Ultraviolet (EUV) and X-ray domains as well as neutron optics. The main topics that will be discussed include:

  • Multilayer X-Ray and Neutron Optics
  • Multilayer Design and Modeling
  • Film Growth and Microstructure
  • Roughness and Interface Formation
  • Surface and Thin-Film Modifications using Ion Beams
  • Film Removal Techniques
  • Growth Models and Computer Simulations
  • X-Ray and Neutron Scattering
  • Surface and Interface Topography
  • Layer and Interface Composition
  • Wavefront Characterization and Correction
  • Mechanical Properties and Stability
  • Optical Properties
  • Novel Characterization Techniques
  • Polarization Control
  • Metrology